SEMICONDUCTOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor improving a temperature characteristic by mitigating effect of thermal stress caused by a difference in linear expansion coefficient to a sensor chip.

SOLUTION: The semiconductor acceleration sensor comprises the sensor chip 1 consisting of a thin beam 12 having a piezoresistive element 15 projecting inward of a frame consisting of a semiconductor substrate and a plummet 14 supported by hanging with the beam 12, and an upper and a lower stoppers 2 and 3 fixed to the frame 11 with a specific gap to the surface of the sensor chip 1 by way of a support 4. The support 4 is joined to a part other than 4 corners of the frame 11, and the angle of the acceleration sensor center to the neighboring support 4 is 90°.

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