CARBON FILM AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a high-performance carbon film having high hardness and high lubricity, and a manufacturing method therefor. SOLUTION: The carbon film A is constituted in such a way that a lubrication part 3 in which a hard part 1 is graphitized is formed in the prescribed part of the surface of the hard part 1 composed of a carbon film of amorphous structure. COPYRIGHT: (C)2003,JPO