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发明名称
Apparatus for and method of cleaning objects to be processed
摘要
申请公布号
EP0833375(A3)
申请公布日期
2001.05.23
申请号
EP19970307511
申请日期
1997.09.25
申请人
TOKYO ELECTRON KABUSHIKI KAISHA
发明人
KAMIKAWA, YUJI;NAKASHIMA, SATOSHI;UENO, KINYA
分类号
H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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