| 摘要 |
<p>The invention discloses an orientation coating method of micro tip. Steps used in the method are as follows:(1) the height definition of exposed tip: depositing a cover on the all surfaces of the tip element, reducing the height of the surface cover using the film cutting technology to expose the top of the tip while the body of the tip were still covered; controling the height of exposed tip by adjusting the parameter of film cutting; (2) surface processing and passivation: providing surface purification processing and passivation protection to exposed tip according to practice: (3) film deposition: depositing a film with repuired material on the top of the tip; (4) element surface cover peeling; peeling off the element surface cover by selective corrosion manner to form the element whose tip were coated oriently. The orientation coating method of micro tip may provide orientation purification and coating to tip.</p> |
