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发明名称
PECVD ZUR ERZEUGUNG VON TAN-SCHICHTEN AUS TANTALHALOGENID-VORLÄUFERN
摘要
申请公布号
DE60004666(D1)
申请公布日期
2003.09.25
申请号
DE20006004666
申请日期
2000.04.26
申请人
TOKYO ELECTRON LTD., TOKIO/TOKYO
发明人
HAUTALA, J.;WESTENDORP, F.
分类号
C23C16/08;C23C16/14;C23C16/34;C23C16/448;C23C16/52;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;(IPC1-7):C23C16/34
主分类号
C23C16/08
代理机构
代理人
主权项
地址
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