发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 PURPOSE: A semiconductor device and a method of fabricating the same are provided to use low resistance as an electrode material. CONSTITUTION: A gate electrode of an n-type MIS transistor includes the first metal-containing film, which is formed in contact with a gate insulation film and has a Fermi level on a conductive band side from a substantial center of a band gap of a semiconductor substrate, and the second metal-containing film formed on the first metal-containing film and having a lower resistance than the first metal-containing film. A gate electrode of a p-type MIS transistor includes a conductive coating film, which is formed in contact with the gate insulation film and has a Fermi level on a valence band side from a substantial center of the band gap of the semiconductor substrate, and the second metal-containing film formed on the conductive coating film and having a lower resistance than the conductive coating film.
申请公布号 KR20020025012(A) 申请公布日期 2002.04.03
申请号 KR20010056991 申请日期 2001.09.15
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUO KOUJI
分类号 H01L21/28;H01L21/336;H01L21/8238;H01L27/092;H01L29/423;H01L29/43;H01L29/49;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L21/28
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