FILM FORMING APPARATUS, HEAD CLEANING METHOD, APPARATUS FOR MANUFACTURING DEVICE, AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a means to reliably and uniformly clean all nozzle surfaces of all heads.

SOLUTION: A wiping unit 70 includes a wiping sheet 75 and a roller 76. The roller 76 has a plurality of pressing surfaces 76b1 divided in the direction of a roller 76 axis line according to a pitch between respective nozzle surfaces 53a, and a rotary shaft 76a which makes the axis line a common axis line. Each pressing surface 76b1 is pressed against each nozzle surface 53a through the wiping sheet 75, thereby cleaned.

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