| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost and small distance measurement device capable of electrically correcting an aligning displacement between a lens and an optical sensor array in a direction perpendicular to the lengthwise direction of the optical sensor array (the lengthwise direction of the optical sensor: Y-direction). SOLUTION: A LOCOS oxide film 7 is selectively formed on a surface layer of an n-semiconductor substrate 1, a p-well region 2 is formed on the surface layer of the substrate 1 interposed by the oxide film 7, and a plurality of separated n-regions 3a-3e are formed on the surface layer of the p-well region 2. Gate electrode wires 5a-5d of polysilicon or the like are formed on the p-well region 2 interposed by the n-regions 3 by interlaying a gate oxide film 4, a pick-up electrode 6 is formed on the n-region 3c formed at the center part of the p-well region 2, and a metal wire 8 of Al or the like is connected to the pick-up electrode 6. The pn-junctions of the n-regions 3 and the p-well region 2 function as optical sensors, and an effective light receiving region 14 is moved by combining the n-regions 3a-3e by an electric signal, so that the aligning displacement can be corrected. COPYRIGHT: (C)2003,JPO |
