| 摘要 |
<p>A fluid-control electro-active device (100) includes a piezo-diaphragm (10) made from a ferroelectric material sandwiched by first and second electrode patterns configured to introduce an electric field into the ferroelectric material when voltage (102) is applied thereto. The electric field originates at a region of the ferroelectric material between the first and second electrode patterns, and extends radially outward from this region of the ferroelectric material and substantially parallel to the plane of the ferroelectric material. The piezo-diaphragm (10) deflects symmetrically about this region in a direction substantially perpendicular to the electric field. An annular region (30) coupled to and extending radially outward from the piezo-diaphragm (10) perimetrically borders the piezo-diaphragm (10). A housing (40) is connected to the annular region (30) and defines at least one fluid flow path (50) therethrough with the piezo-diaphragm (10) disposed therein.</p> |
