A micro-opto-electro-mechanical system (MOEMS),申请号EP20020252944-传众专利搜索

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发明名称	A micro-opto-electro-mechanical system (MOEMS)
摘要
申请公布号	EP1255149(A3)	申请公布日期	2003.09.24
申请号	EP20020252944	申请日期	2002.04.25
申请人	XEROX CORPORATION	发明人	CHEN, JINGKUANG;SUN, DECAI;KUBBY, JOEL A.
分类号	B81B7/02;G02B6/35;G02B6/42;G02B26/08;(IPC1-7):G02B26/02	主分类号	B81B7/02
代理机构		代理人
主权项
地址

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