DUMMY KEY ARRANGEMENT STRUCTURE OF STEPPER RETICLE AND WAFER

摘要

PURPOSE: A dummy key arrangement structure of a stepper reticle is provided to reduce fabricating cost of a semiconductor product by minimizing the loss of a net die on a wafer caused by a dummy key arrangement. CONSTITUTION: A field(31) composed of several dies(32) arranged in rows and columns is formed in the stepper reticle(30). A dummy key(33) is formed on or under the field. A pair of PM keys(34) are disposed in the right-and-left sides of the dummy key. A chemical mechanical polishing(CMP) compensation pattern(35) is disposed in the periphery of the PM key.