| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for collecting a very small amount of organic compounds and an analyzer using the same capable of easily and inexpensively collecting and analyzing the very small amount of organic compounds adhering to the surface of a photomask and efficiently collecting and analyzing all the very small amount of organic compounds of a pattern forming part even in a square photomask. SOLUTION: The apparatus for collecting the very small amount of organic compounds is provided with a collecting area formed by sandwiching both a sealant and the photomask between a top plate and a bottom plate, a heating means of the photomask, and a carrier gas supply/discharge means for discharging a carrier gas while supplying the carrier gas for the collecting area, and collects components of the carrier gas. The sealant surrounds the pattern part in the surface of the photomask, and is provided with a carrier gas supply opening and a discharge opening at least on the side surfaces of the sealant in the apparatus for collecting the very small amount of organic compounds, and the analyzer using the same is provided. COPYRIGHT: (C)2003,JPO
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