| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate measuring device capable of preventing collision of particles and adhesion of contaminants to a sensing part, and stably and surely measuring an air flow rate. <P>SOLUTION: This flow rate measuring device comprises a flow path 3 for introducing and distributing measured air, and a sensing part 4 exposed on one face of a pedestal 14 installed in the flow path 3 and measuring the flow rate of the measured air. The pedestal 14 is installed in the flow path 3 in a manner to be inclined in the direction hiding the sensing part 4 against the flow of the measured air. <P>COPYRIGHT: (C)2003,JPO</p> |
