| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of reducing transmission of an impact to a device when a rotor is destroyed. SOLUTION: An inside casing 10 is arranged between an outside casing 9 and a spacer ring 7 with a clearance from each other. The inside casing 10 is pinched between a flange 11 of the outside casing 9 and a base 1, and an elastic member 20 is arranged between the inside casing 10 and the base 1. Since one end of the inside casing 10 for absorbing an impact is elastically supported, when an impact of a broken piece of the motor is applied to the inside casing 10, the base 1 and the outside case 9 are hardly damaged and continue to revolute. As a result, an impact to be transmitted to the device can be remarkably reduced. COPYRIGHT: (C)2003,JPO
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