发明名称 Magnetic recording medium and method and apparatus for manufacturing the same
摘要 A magnetic recording medium includes the following: an electrical insulating film; a ferromagnetic metal thin film, a hard carbon film, and a lubricant layer formed on the surface of the electrical insulating film in the indicated order; and a back-coating layer formed on the back of the electrical insulating film. The number of dropouts is not more than 200, and the still life is not less than 10 minutes. A method for manufacturing the magnetic recording medium includes the following: bringing the ferromagnetic metal thin film into contact with an outermost layer of a resistance roller (10, 11), the resistance roller (10, 11) including a columnar or cylindrical conductive axis, an innermost layer, and the outermost layer, wherein a portion that is formed around the conductive axis and defined between the innermost layer and the outermost layer has a resistance gradient in its thickness direction so that a resistance is low on the innermost layer side and high on the outermost layer side; supplying a reactant gas of hydrocarbon to a decompression chamber (12) while applying a voltage to the conductive axis of the resistance roller (10,11); and forming the hard carbon film on the ferromagnetic metal thin film by plasma CVD. This magnetic recording medium can maintain high reliability even under severe working conditions. <IMAGE>
申请公布号 EP1345213(A1) 申请公布日期 2003.09.17
申请号 EP20030005414 申请日期 2003.03.13
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 TAKAHASHI, KIYOSHI;IMAMURA, JUNICHI;IMAI, TOMOFUSA
分类号 C23C16/26;C23C16/54;G11B5/72;G11B5/725;G11B5/84 主分类号 C23C16/26
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