PLASMA PROCESSING APPARATUS AND DRIVING METHOD THEREOF, PLASMA PROCESSING METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

摘要

A plasma processing apparatus and a driving method thereof, and a plasma processing method, and a manufacturing method of an electronic device are provided to activate cleaning gas by utilizing the power of microwave. A plasma processing apparatus, which includes a space part(66) and a cleaning gas path(61), executes a plasma process on an objective processing member disposed in a processing chamber by utilizing microwaves through a waveguide(35). The space part is surrounded by a wall formed dielectrics in the waveguide. The cleaning gas path is used to supply cleaning gas into the processing chamber through the space part.