| 摘要 |
In a guide apparatus having an ultrasonic motor as a driving source of a stage, it is intended to accurately comprehend a degree of abrasion between a friction member of a frictionally driven ultrasonic motor and a drive transmitting member of the stage. A guide apparatus is constructed by an ultrasonic motor, a stage capable of moving on the basis of a friction driving with the ultrasonic motor, a position detecting means for detecting a position of the stage, a driving control portion for outputting a driving command signal to the ultrasonic motor, a non-contact type measuring means for measuring a position information of a friction member in the ultrasonic motor, a slip distance measuring portion for calculating a slip distance of the friction member in the ultrasonic motor, and a monitoring portion 1 equipped with tangential force measuring portion for calculating a tangential force applied to a driving surface of the drive transmitting member in the stage on the basis of the friction driving with the ultrasonic motor. |
