| 摘要 |
A plant for application of nanometer coatings with periodic structure on inside surface of articles of cylinder form, which comprises vacuum chamber with systems of vacuum pumping out, introduction and regulation of pressure of working gases, coaxial with vacuum chamber system of transportation of processed products through working zone magnetron sprays with cathodes which are made of different metals. It contains two magnetron sprays, which are mounted diametrically on walls of vacuum chamber, at that correspondingly magnetic poles of magnetrons have opposite polarity. An axis of vacuum chamber is rotary actuator for one processed article. Screens in the size are approximately equal to the sizes of cathodes of magnetron and are mounted with the of possibility disposition between cathodes of magnetrons and processed article of angularly 90 ° to this position. At that screens are common anode of displacement spring, which is included between the screen and processed article, and power supply of magnetron discharge, which negative is pole connected to cathodes of magnetrons through switchboard. |
