| 摘要 |
PURPOSE: A vacuum valve of a semiconductor fabrication apparatus is provided to reduce a manufacturing cost by operating manually a driving shaft. CONSTITUTION: A vacuum valve of a semiconductor fabrication apparatus includes a main housing(100), an auxiliary housing(120), a switching portion(140), and a switching control portion(180). The main housing(100) includes a passing hole(102) and the first slide space(104). The passing hole(102) is connected to a connection tube between a process chamber and a pump. The first slide space is perpendicular to the passing hole(102). The auxiliary housing(120) includes the second slide space(122) connected to the first slide space(104). The switching portion(140) open or shut the passing hole(102) and includes a driving shaft(160). The switching control portion(180) is installed at the auxiliary housing(120) in order to operate manually the driving shaft(160).
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