CHUCK PIN FOR FIXING SUBSTRATE

摘要

A chuck pin for fixing the substrate is provided to prevent the bottom surface of substrate from being polluted by the drug solution by discharging the drug solution to the outside of the chuck pin. A chuck pin(110) for fixing the substrate is located around the substrate. The chuck pin for fixing the substrate fixes the substrate with the frictional force. The chuck pin for fixing the substrate includes a groove portion(112) and a hole(114). The groove portion is formed along the lateral side which is connected with the substrate. The hole passes through the chuck pin on the cross-section of the chuck pin. The hole discharges the drug solution streaming down along the crevice in which the substrate and the chuck pin contact to the chuck pin outside.