| 摘要 |
PROBLEM TO BE SOLVED: To provide a motor for vacuum which is of small size and light weight and is low in manufacturing cost. SOLUTION: In the motor 4 for vacuum to be used in a vacuum chamber 1, a speed reducer 7 having a mounting flange 8 on the load side is installed at a tip of a motor 6. A mounting ring 9 which tightens and fastens an O-ring 10 sandwiched between the mounting ring and a rim 3a of a motor installation hole 3 formed in a vacuum chamber is fastened on the mounting flange 8. A vacuum seal 12 which is formed of resin and brought into contact with an output shaft 7a of the speed reducer 7 and isolates an internal space of the speed reducer 7 and the motor 6, and the internal space of the vacuum chamber 1 from each other is fastened on the mounting flange 8 or the mounting ring 9. COPYRIGHT: (C)2003,JPO
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