| 摘要 |
PROBLEM TO BE SOLVED: To provide a solenoid type fluid controller which absorbs a deviation of central axes of a plunger inserted in an electromagnetic coil and a stem, eliminates looseness in an axial direction, and delicately and accurately controls a flow rate. SOLUTION: This fluid controller is composed of a valve body having a channel, the stem opening/closing the channel, an actuator provided with the plunger inserted in the coil and raised by energizing, and a coupling member coupling the stem and the plunger. The coupling member is composed of a shaft connected to a stem upper end portion, and a joint coupling a shaft upper end portion and a plunger lower end portion. A spring seat is provided on a shaft outer periphery, and a spring downwardly energizing the shaft is interposed between the spring seat and a bottom surface of the actuator. A notch shaped in a tongue in a top view and having an upper part diameter smaller than a lower part diameter is formed from the center to one side surface on a shaft upper end surface. A stepped cylindrical column portion having a lower step portion diameter larger than an upper step portion diameter is formed at a joint lower end portion. The stepped cylindrical column portion is engaged with the notch portion, thereby coupling the joint and the shaft. COPYRIGHT: (C)2003,JPO
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