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发明名称
Apparatus and method for projection exposure
摘要
申请公布号
EP0834771(B1)
申请公布日期
2003.09.10
申请号
EP19970121449
申请日期
1994.07.15
申请人
NIKON CORPORATION
发明人
SHIRAISHI, NAOMASA
分类号
G03F7/20;G03F7/207;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
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