| 摘要 |
PROBLEM TO BE SOLVED: To provide a means capable of both securing higher spatial resolution than a method comprising a conventional scanning probe microscope in analysis of a microregion in the surface of matter and identifying the chemical constitution of the matter. SOLUTION: The gas chromatograph scanning probe microscope comprises both a scanning probe microscope and a gas chromatograph mass analyzer. The scanning probe microscope is provided with both a means for heating, vaporizing, and decomposing a point of observation of a sample to be observed at the tip of a probe fixed to the side of one end of a cantilever and a gas introduction path communicating from an opening at the tip of the probe to an opening on the side of the other end of the cantilever through inside the cantilever. The gas chromatograph mass analyzer receives gases from the opening on the side of the other end of the cantilever via a gas conduit. COPYRIGHT: (C)2003,JPO
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