APPARATUS OF SURFACE ROUGHNESS SENSOR AND STRUCTURE OF PROCESSING TOOL USING THE SAME

摘要

Disclosed is a surface roughness measurement sensor device. The surface roughness measurement sensor device includes: a rotary shaft; a piezoelectric sensor which is periodically rotated by rotation of the rotary shaft while being arranged around the rotary shaft, and generates a sensing signal in accordance with pressure applied by the surface of an object by coming in contact with the surface of the object directly; and a signal delivery part to deliver the sensing signal sent from the piezoelectric sensor to the outside. The piezoelectric sensor is periodically rotated in a direction to perform a relative motion with the surface of the object at a spot where the piezoelectric sensor comes in contact with the object, so as to minimize damage to the surface of the object.