Process and apparatus for drying workpieces

摘要

The apparatus for cleaning and drying of workpieces includes a treatment chamber (1) which has at least one controllable liquid outlet (4) and can sustain a reduced pressure. The chamber accommodates a spray unit (8a, 8b) for delivery of a cleaning liquid and/or a gaseous medium, and is provided with a workpiece carrier (12). The latter is translatable or rotatable and/or the spray unit is rotatable. Also claimed is a method for cleaning workpieces which includes loading of the workpieces into the chamber, production of a liquid bath which at least partially surrounds the workpieces, and production of a reduced pressure in the gas space above the bath. It further includes introduction of a cleaning liquid and/or a gaseous medium under pressure into the treatment chamber, and displacement of the workpiece carrier so that the workpieces alternately pass through the liquid bath and the gas space above it.