| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean module in which air flow turbulence (partial up- flow) is not generated even if a clean module is arranged in a clean room. SOLUTION: In this clean module for partially maintaining or improving air cleanliness in which outside air is sucked into a blower, the sucked outside air is filtered and the cleaned air is blown off by down-flow, piping for sucking air is provided extending to below a floor, and the piping for sucking air is used as an up-flow duct for sucking all the outside air to be sucked from below the floor. COPYRIGHT: (C)2003,JPO
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