| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide stable drive property produced by an ultrasonic motor by preventing the abrasion powder produced by the friction drive between the ultrasonic motor and a movable body from being caught into the gap between the ultrasonic motor and the movable body of a guide device. <P>SOLUTION: In a guide device to move a stage 63 as a movable body by the friction drive between the ultrasonic motor and the stage 63 as a movable body, a dust removing means 1 having injection holes 4 for compressed gas and exhaust grooves 6 and 7, which are arranged around the injection holes 4, is arranged in the gap provided at a position near the faces where the stage 63 and the ultrasonic motor abut on each other. In the guide device, the abrasion powder attached to the faces where the stage 63 and the ultrasonic motor abut on each other is blown off by injecting compressed gas from the injection hole 4 of the dust removing means 1 and the abrasion powder is also collected from the exhaust grooves 6 and 7 of the dust removing means 1. <P>COPYRIGHT: (C)2003,JPO |
