发明名称 Semiconductor device utilizing alignment marks for globally aligning the front and back sides of a semiconductor substrate
摘要 The present invention provides for globally aligning microelectronic circuit systems, such as communication devices and chips, fabricated on or bonded to the front and back sides of one or more substrates to provide for wireless communications between the circuit systems through the one or more substrates. In one embodiment, two circuit systems situated on opposite sides of a substrate are aligned to provide for wireless communications between the two circuit systems through the substrate. In another embodiment, communication devices situated on one or more substrates are aligned to provide for wireless communications between the communication devices through the one or more substrates. In another embodiment, two chips situated on opposite sides of a transparent substrate are aligned to provide for wireless communications between the two chips through the transparent substrate.
申请公布号 US6617702(B2) 申请公布日期 2003.09.09
申请号 US20010769080 申请日期 2001.01.25
申请人 IBM CORPORATION 发明人 HSU LOUIS L.;JOSHI RAJIV V.;RADENS CARL;MANDELMAN JACK A.;YUAN TSORNG-DIH
分类号 H01L21/822;H01L23/48;H01L23/544;H01L27/06;(IPC1-7):H01L23/544 主分类号 H01L21/822
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