发明名称 |
Method and apparatus for using integrated remote identifier |
摘要 |
The present invention provides for a method and an apparatus for using an integrated remote identifier for processing semiconductor wafers. Process data is associated with a remote identifier. A remote identifier interfacing process based upon the remote identifier is performed. A first processing run of semiconductor devices is performed in response to the remote identifier interfacing process.
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申请公布号 |
US6618640(B1) |
申请公布日期 |
2003.09.09 |
申请号 |
US20010832673 |
申请日期 |
2001.04.11 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
HITTNER TODD EDWARD;GROVER JASON ALAN |
分类号 |
G05B19/418;(IPC1-7):G06F17/10 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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