| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an anti-reflection film having anti-reflection performance over a wide band from the ultraviolet region to the visible region, further to the infrared region. <P>SOLUTION: Counted from the substrate side, a film with an intermediate refractive index material is formed on a first layer, a film with a high refractive index material is formed on a second and a fourth layers, a film with a low or intermediate refractive index material is formed on a third layer, and a film with a low refractive index material is formed on a fifth layer, respectively. The film thickness and of each optical layer, in terms of the design wavelength λ, is (0.08 to 1.31)×λ/4 in the first layer, is (0.17 to 0.36)×λ/4 in the second layer, is (0.45 to 0.91)×λ/4 in the third layer, is (0.15 to 0.33) ×λ/4 in the fourth layer, and is (1.13 to 1.17)×λ/4 in the fifth layer. <P>COPYRIGHT: (C)2003,JPO |
