| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure the inclined angle of a shaft so that no error will be caused. SOLUTION: An inclined angle measuring instrument measures the inclined angle of the shaft 1 erected on the acting base of an objective lens unit. The acting base 2 is placed on the center table 17c of a measurement table 17 and set to a horizontal state by projecting a light ray upon a mirror 21 placed on the base 2 from an auto-collimator 18 and adjusting the levelness of the intermediate frame 17b and center table 17c of the measurement table 17 based on the inclined angle of the reflected light of the light ray from the mirror 21. After the base 2 is set to the horizontal state, a measuring jig 20 put on the shaft 1 is intermittently rotated by prescribed angles around the axis of the shaft 1 and the inclined angleαof the shaft 1 is measured several times by projecting a light ray upon the mirror 19 of the measuring jig 20 from the auto-collimator 18 while the jig 20 is stopped. COPYRIGHT: (C)2003,JPO
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