| 摘要 |
PROBLEM TO BE SOLVED: To generate a plasma that has superb uniformity in a plasma distribution and is clean even on a board having a large area. SOLUTION: A plasma source provided at a position opposite to a board W is divided into a plurality of plasma source units 11 that can be independently controlled. Gas supply ports 41 and 42 and a gas exhaust vent 43 are provided for each plasma source unit 11. An electrode 13 for discharge is provided over the respective plasma source units 11, and high-frequency power to be added to the electrode 13 via a variable inductance 23 can be adjusted. Permanent magnets 31 are provided over the respective electrodes 13 for discharge, arrangement is made by polarity where lines of magnetic force of respective permanent magnets are connected, and magnetron discharge can be controlled by changing the interval and magnetic field strength of the permanent magnet 31. A grid 14 is provided under the plasma source unit 11, and an electronic temperature can be controlled at a grid interval. COPYRIGHT: (C)2003,JPO
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