| 摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, and catalyst-free substrate grown graphene. The manufacturing method of catalyst-free substrate grown graphene comprises the following steps of: (a) preparing a substrate on which a substrate layer is formed; (b) supplying carbon-containing gas, and conducting inductively coupled plasma-chemical vapor deposition (ICP-CVD); and (c) growing graphene on the substrate layer without having the catalyst-free layer. |
