发明名称 FRAGILE MATERIAL SUBSTRATE SCRIBER, FRAGILE MATERIAL SUBSTRATE PROCESSING MACHINE, FRAGILE MATERIAL SUBSTRATE POLISHING DEVICE, AND FRAGILE MATERIAL SUBSTRATE PARTING SYSTEM
摘要 <p>A fragile material substrate scriber, a fragile material substrate processing machine, a fragile material substrate polishing device, and a fragile material substrate parting system, the polishing device characterized by polishing the side edges of a parted fragile material substrate; the parting system with a flat display characterized by comprising at least one unit of the fragile material substrate scriber and the fragile material substrate polishing device for polishing the side edges of the parted fragile material substrate after the scribed fragile material substrate is parted; wherein a break process is eliminated to cope with an increase in the size of an adopted substrate.</p>
申请公布号 WO2003072516(P1) 申请公布日期 2003.09.04
申请号 JP2003000296 申请日期 2003.01.15
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