Pressure sensor has three zones formed from ceramic substrate, each having different thickness, and strain-sensitive resistances provided on other side

摘要

The pressure sensor has a sensor element formed from a ceramic substrate. The sensor element is formed from three zones extending over an area along the X and Y axes, and each having different thicknesses. The thickness of each zone extends in the direction of the Z axis. At least four strain-sensitive resistances (12,13) are arranged on the side of the sensor element to which pressure is not applied.