FAULT DETECTION METHOD AND APPARATUS USING MULTIPLE DIMENSION MEASUREMENTS

摘要

A method for identifying faults includes processing a plurality of manufacturedd items (210) in a process flow (10); measuring a first dimension of a feature (300, 360) formed on the manufactured items (210) at a first position; measuring at least a second dimension of the feature (300, 360) at a second position proximate the first position; calculating a dimension metric based on the first and second measured dimensions; and comparing dimension metrics for a set of the manufactured items (210) to identify a drift condition. A manufacturing system includes a plurality of tools (30-80, 220) for processing manufactured items (210) to identify a drift condition. A manufacturing system includes a plurality of tools (30-80, 220) for processing manufactured items (210) in a process flow (10), a metrology tool (220), and a fault monitor (130). The metrology tool (220) is adapted to measure a first dimension of a feature (300, 360) formed on the manufactured items (210) at a first position and measure at least a second dimension of a feature (300, 360) formed on the manufactured items (210) at a first position and measure at least a second dimension of the feature (300, 360) at a second position proximate the first position. The fault monitor (130) is adapted to calculate a dimension metric based on the first and second measured dimension and compare dimension metrics for a set of the manufactured items (210) to identify a drift condition.