发明名称 Semiconductor circuit arrangement and a method for producing same
摘要 The invention relates to a semiconductor circuit arrangement comprising a circuit element that is embodied in a semiconductor substrate (1) of a first conductivity type in an integrated manner and is provided with at least one gate electrode (G1, G2) and a first (D) and a second electrode connection (S). According to the invention, the at least one gate electrode is at least partially silicated on the side thereof facing away from the main surface of the semiconductor substrate.
申请公布号 US2003164523(A1) 申请公布日期 2003.09.04
申请号 US20020148240 申请日期 2002.08.26
申请人 HERZUM CHRISTIAN;KRUMBEIN ULRICH;MULLER KARL-HEINZ 发明人 HERZUM CHRISTIAN;KRUMBEIN ULRICH;MULLER KARL-HEINZ
分类号 H01L21/28;H01L21/336;H01L27/02;H01L27/06;H01L29/78;(IPC1-7):H01L29/76 主分类号 H01L21/28
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