| 摘要 |
<p>A method and a device for manufacturing a semiconductor or insulator/metallic laminar composite cluster, the method comprising the step of spattering fluid on targets (11U) and (11D) in a first cluster source chamber (10) to generate semiconductor or insulator vapor, spattering fluid on targets (21U) and (21D) in a second cluster source chamber (20) to generate metallic vapor, feeding, as cluster beam, the semiconductor or insulator vapor and metallic vapor coagulated and grown to the cluster when flowing through a cluster growing pipe (32) into a depositing chamber (30) maintained in a high vacuum atmosphere, and stacking, on a substrate (35), the cluster having metallic clusters and semiconductor or insulator clusters combined with each other in layer shape. The semiconductor (insulator)/metallic multilayer composite cluster thus manufactured is used, by utilizing a high functionality, as a high sensitive sensor, a high-density magnetic recording medium, a nano magnet medium for carrying chemicals, various types of catalysts, a permselective membrane, a photomagneto sensor, and a low loss soft magnetic substance.</p> |
