发明名称 MICROPOSITIONING DEVICE
摘要 This invention relates to a device for micropositioning of an object ( 4 ), e.g. for use in a microscope. The device comprises an acceleration unit ( 1 ) and an intermediate part ( 3 ), connecting said acceleration unit ( 1 ) with said object ( 4 ). The position of the object relative to the acceleration unit ( 1 ) is variable at high acceleration or retardation of said acceleration unit ( 1 ), owing to mechanical inertia of the object ( 4 ). Further, the intermediate part ( 3 ) has a first end ( 3 '), being attached to said acceleration unit ( 1 ), and a second end ( 3 ''), being provided with an essentially circumferential contact surface ( 3 a), and the object ( 4 ) is provided with clamping elements ( 4 '). These clamping elements ( 4 ') are adapted to clamp around said contact surface ( 3 a) of said intermediate part ( 3 ) in order to hold the object ( 4 ) in relation to the intermediate part ( 3 ) merely by the clamping force and the frictional force exerted by said clamping elements ( 4 ') upon said contact surface ( 3 a).
申请公布号 EP1340112(A1) 申请公布日期 2003.09.03
申请号 EP20010999851 申请日期 2001.12.03
申请人 NANOFACTORY INSTRUMENTS AB 发明人 OLIN, HAKAN;ALTHOFF, FREDRIK;SVENSSON, KRISTER
分类号 G01B21/00;G02B21/32;G01N27/00;H01L41/08;H01L41/09;(IPC1-7):G02B21/32 主分类号 G01B21/00
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