FILAMENT ISOLATING APPARATUS OF SEMICONDUCTOR IMPLANTER EQUIPMENT

摘要

PURPOSE: A filament isolating apparatus of a semiconductor implanter equipment is provided to be capable of restraining the reaction between a filament installed at an arc chamber and impurity source gas. CONSTITUTION: A semiconductor implanter equipment comprises an arc chamber for ionizing supplied gas molecules, an electrode line connected to the arc chamber for supplying ionization energy, and an ion generation apparatus having a filament(40) connected to the electrode line. The semiconductor implanter equipment further includes a filament isolating part(50) for separating the filament from the arc chamber. The filament isolating part includes an inner hole(51) formed for connecting the filament and the filament isolating part and a protruding part(55) formed and protruded to the inner portion of the hole for supporting the filament.