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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6257228(A)
申请公布日期
1987.03.12
申请号
JP19850197123
申请日期
1985.09.06
申请人
TOSHIBA CORP
发明人
MAEGUCHI KENJI;NOGUCHI TATSUO
分类号
H01L29/78;H01L21/76
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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