发明名称 Object coated with carbon film and method of manufacturing the same
摘要 The invention describes a method for manufacturing an object having a portion to be in contact with another object, said portion being made of a polymer material and having a surface entirely or partly coated with a carbon film, the method comprising the steps of effecting a pretreatment on a deposition surface of said portion by exposing said deposition surface to a plasma of a fluorine-containing gas, or the pretreatment being performed by irradiating said deposition surface of said portion with ultraviolet rays and/or electron rays; and subsequently forming a carbon film on the deposition surface of said portion by a plasma CVD method, an ion-plating method or a sputtering method.
申请公布号 EP1340835(A2) 申请公布日期 2003.09.03
申请号 EP20030012938 申请日期 1997.06.26
申请人 NISSIN ELECTRIC CO., LTD. 发明人 NAKAHIGASHI, TAKAHIRO;DOI, AKIRA;IZUMI, YOSHIHIRO;KUWAHARA, HAJIME
分类号 C23C16/02;C23C16/26;C23C16/507;C23C16/515;(IPC1-7):C23C14/06;C23C14/02 主分类号 C23C16/02
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