| 摘要 |
<p>PROBLEM TO BE SOLVED: To retain even a work disliking influence of a discharge gas in a carrying device flowing the gas along the front end of a carrier head to form a negative pressure and retaining the work by the negative pressure, by restricting a diffusing direction of the discharge gas to a specific direction. SOLUTION: In this carrying device, the front end of a carrier head 1 is formed with a gas guide face 3 and a gas diffusion face 4 on both sides of an edge line part 5, respectively set as slant faces to the work W. The gas guide face 3 is provided with a nozzle 6, and a gas discharged from a gas discharge port 8a formed in the gas guide face 3 is let out from a slit 9 as a jet layer A with the jet layer A contacted with the gas guide face 3. By diffusing the jet layer A from the gas guide face 3 through the edge line part 5 with the jet layer A contacted with the gas diffusion face 4, a negative pressure is generated from the edge line part 5 to the gas diffusion face 4 to retain the work W in a non-contact state.</p> |
