ARM HARD STOP JIG FOR SEMICONDUCTOR ION IMPLANTER

摘要

PURPOSE: An arm hard stop jig is provided to achieve improved yield rate by preventing mis-alignment of arm fold through the use of the arm hard stop jig. CONSTITUTION: A semiconductor ion implanter comprises a screw support unit(12) mounted on a carriage assembly(10); a hard stop screw(14) mounted on the screw support unit; a fixing nut(15) for fixing the hard stop screw to the screw support unit; and an arm hard stop jig(16) having a hole formed at the center of the arm hard stop jig, and which is mounted on the screw support unit and prevents the hard stop screw from moving backward. The hole of the arm hard stop jig has a length of 0.31 inch.