| 摘要 |
PROBLEM TO BE SOLVED: To provide an efficient exciting method of a plasma in a line state, in a remote plasma treatment apparatus wherein a plasma generating section for generating the plasma, by exciting an excited gas is separated from a treatment section for reacting and treating a target by using a gas excited by the plasma. SOLUTION: The plasma generating section comprises a chamber made of an insulative material, and the plasma is generated by carrying a current to a high frequency coil wound around the chamber. The chamber is formed to be an elliptic structure as shown in Fig. 1 so that the uniform plasma is generated in a line direction. COPYRIGHT: (C)2003,JPO
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