| 摘要 |
PROBLEM TO BE SOLVED: To improve durability of a static charge eliminator. SOLUTION: A head 1 composed of a conductor is fitted to an eliminator body 12, a through-hole 15 communicating with an air supply source 16 is formed in the head 1, and a bushing 22 as an insulating member for discharge adjustment is fitted into the through-hole 15. A discharge needle 21 is arranged on an one-end side of the bushing 22 in the eliminator body 12 with the tip thereof located in the through-hole 15, and a joint 24, in which a communication hole 25 communicating with an air guide passage 23 has been formed, is fitted on the other-end side of the bushing 22. The bushing 22 is formed with an inorganic substance high in insulating property and free of hydrogen, such as a ceramic, and the joint 24 is formed with a plasma-resistant material such as graphite. COPYRIGHT: (C)2003,JPO
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