Microelectromechanical generator using bubbles

摘要

A micro-electro-mechanical generator has a liquid chamber, a heating block, an elongated elastic piezoelectric plate and a pair of electrodes. The liquid chamber is defined by bottom blocks which include the heating block and side walls, and can maintain a liquid. The heating block generates bubbles within the liquid chamber. The elongated elastic piezoelectric plate has a piezoelectric material layer, and is positioned in the liquid chamber adjacent to an upper portion of the heating block. The elongated elastic piezoelectric plate is deformable by contact with the bubbles, wherein a first end of the elongated elastic piezoelectric plate is a free end and a second end of the elongated elastic piezoelectric plate is a fixed end. The pair of electrodes are electrically connected to the piezoelectric material layer.