发明名称 |
Verfahren und Vorrichtung zur kontinuierlichen Herstellung von Feststoffen |
摘要 |
A liquid material such as molten silicon is stored in a crucible. A liquid material, which is identical to and held in the same conditions as the liquid material in the crucible, is continuously supplied from an auxiliary crucible to the crucible to keep constant the surface level of the liquid material in the crucible. The liquid material is continuously pulled up from the crucible at a predetermined speed while the liquid material is being solidified into a solid material such as a ribbon-like thin web of single-crystal silicon. |
申请公布号 |
DE69716385(T2) |
申请公布日期 |
2003.08.28 |
申请号 |
DE1997616385T |
申请日期 |
1997.04.21 |
申请人 |
EBARA CORP., TOKIO/TOKYO |
发明人 |
OGURE, NAOAKI;TERASHIMA, KAZUYOSHI |
分类号 |
C30B29/06;C30B15/00;C30B15/02;C30B15/20;H01L31/04;(IPC1-7):C30B15/10;C30B15/12 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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