| 摘要 |
PROBLEM TO BE SOLVED: To allow the influence on a sensor characteristic due to a process fluctuation to be reduced without deteriorating sensitivity in a capacitive acceleration sensor. SOLUTION: The capacitive acceleration sensor S1 is provided with a beam part 22 having a spring function for displacing in Y direction in accordance with applied acceleration, a movable electrode 24 integrally formed in the beam 22 having a beam shape extending in the direction orthogonal to the displacement direction Y of the beam 22 and capable of displacing along with the beam 22 in the displacement direction of the beam, and fixed electrodes 32, 42 disposed opposite to the movable electrode 24. The acceleration is detected based on a capacitance change between the movable electrode 24 and the fixed electrodes 32, 42 generated by the application acceleration. In the capacitive acceleration sensor S1, an electrode interval (d) as an interval between the movable electrode 24 and the fixed electrodes 32, 42 in the displacement direction Y of the beam 22 is identical to a beam width (b) as a width of a part extending in a direction orthogonal to the displacement direction Y in the beam 22. COPYRIGHT: (C)2003,JPO |
